发明名称 |
Single crystalline diamond and producing method thereof |
摘要 |
<p>The object of the present invention is to obtain a high quality single crystalline diamond that has less distortion and large area suitable for semiconductor device substrates or an optical component material. The present invention is a single crystalline diamond produced by chemical vapor deposition, wherein, when a linear polarized light which is composed of two linear polarized lights perpendicular to each other is introduced into one main face of the single crystalline diamond, a maximum value of a retardation between the two linear polarized lights perpendicular to each other which come out from an opposite main face is not more than 50 µm at maximum per a thickness of 100 µm across an entire of the single crystalline diamond, and also a method for producing the diamond.</p> |
申请公布号 |
EP1712661(A1) |
申请公布日期 |
2006.10.18 |
申请号 |
EP20060251968 |
申请日期 |
2006.04.07 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
MEGURO, KIICHI;YAMAMOTO, YOSHIYUKI;IMAI, TAKAHIRO |
分类号 |
C30B29/04;C30B25/20 |
主分类号 |
C30B29/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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