摘要 |
<p>An insoluble anode (1) comprises an anode base body (2) having a non-noble metal outer surface; and screen. The anode base body comprises a metal base body material which is conductive in alkaline solutions from steel, stainless steel, nickel, nickel alloy, cobalt or cobalt alloy; and screen (3). Independent claims are also included for: (1) a method for electrolytic plating of a metal deposit onto a substrate comprising immersing the substrate into an alkaline electrolytic plating bath comprising a source of metal ions; and supplying electrical current to the electrolytic plating bath to deposit metal onto the substrate and fill the feature; and (2) an electrolytic plating bath and apparatus for electrolytically plating a metal onto a substrate comprising a plating tank; alkaline electrolytic plating composition in the plating tank; cathode; and insoluble anode.</p> |