| 摘要 |
<p>An optical modulation nano-scale aperture array device and a high speed nano-scale pattern recording system using the same are provided to reduce the size of a condensed optical flux and to embody a uniform distance between an aperture array and a recording medium by using an immersion thin film and a distance keeping layer. An optical modulation nano-scale aperture array device includes a space optical modulation part, a microlens array(16) for condensing light, a substrate(20) for loading the microlens array through one surface, an aperture array(30) attached to the other surface of the substrate, a distance keeping layer for spacing the aperture array apart from a recording medium, and an immersion thin film(40) made of a transparent dielectric material with a larger refractive index than that of the air.</p> |
