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发明名称
METHOD FOR FAST AND ACCURATE DETERMINATION OF THE MINORITY CARRIER DIFFUSION LENGTH FROM SIMULTANEOUSLY MEASURED SURFACE PHOTOVOLTAGES
摘要
申请公布号
EP1311825(B1)
申请公布日期
2006.10.18
申请号
EP20010959771
申请日期
2001.06.29
申请人
SEMICONDUCTOR DIAGNOSTICS, INC.
发明人
LAGOWSKI, JACEK;FAIFER, VLADIMIR;ALEYNIKOV, ANDREY
分类号
H01L21/66;G01R31/308;G01R31/26;G01R31/265;G01R31/28;G01R31/302;H01J40/14
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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