Method to inspect a wafer

摘要

The method involves taking an image of a wafer, and automatically evaluating the image by comparing a histogram (94) of the taken image with a histogram (93) of a reference image. The histogram is a color value histogram or a gray value histogram. The image of the wafer is automatically taken again if necessary in dependence of the evaluation and is evaluated for inspection of a surface of the wafer. The histogram represents a highly reduced and quantitatively comparable dataset of the image.