发明名称 ANALYZER
摘要 <p>An analyzer includes an optical tunable filter 1 for selectively outputting light having a predetermined wavelength, and a PD 421 for receiving light outputted from the optical tunable filter 1 and then passed through or reflected by an object to be measured. The optical tunable filter 1 includes a first substrate 3 including a movable portion 31 having a light transmitting property; a second substrate 2 having a light transmitting property, the second substrate being provided so as to be opposed to the first substrate; a first gap 21 and a second gap 22 which are respectively provided between the movable portion 31 of the first substrate 3 and the second substrate 2 ; an interference portion which cases interference with light that enters the optical tunable filter 1 and that has the predetermined wavelength between the movable portion and the second substrate 2 by means of the second gap 22 ; and a driving portion for changing a distance of the second gap 22 by displacing the movable portion 31 with respect to the second substrate 2 using the first gap 21.</p>
申请公布号 KR100636463(B1) 申请公布日期 2006.10.18
申请号 KR20040078337 申请日期 2004.10.01
申请人 发明人
分类号 G01N21/05;G01J3/26;G01N21/01;G01N21/17;G01N21/31;G01N21/35;G01N21/3577;G01N21/59;G02B5/28;G02B26/00 主分类号 G01N21/05
代理机构 代理人
主权项
地址