发明名称 Method for generating an electrical contact with buried track conductors
摘要 A semiconductor structure 300 comprises a plurality of first track conductors 303 , a plurality of second track conductors 304 , which are insulated with respect to the first track conductors 303 and form a grid together with these first track conductors 303 , and a plurality of third track conductors 307 parallel above the first track conductors 303 , which third track conductors 307 partly cover the second track conductors 304 and are insulated with respect thereto, in which semiconductor structure 300 , between in each case two adjacent second track conductors 304 , there is located an electrical contact 305 between each first track conductor 303 and the corresponding third track conductor 307 which lies above it.
申请公布号 US7122434(B2) 申请公布日期 2006.10.17
申请号 US20050124726 申请日期 2005.05.09
申请人 INFINEON TECHNOLOGIES AG 发明人 LUDWIG CHRISTOPH;MORHARD KLAUS-DIETER;KUTTER CHRISTOPH
分类号 H01L21/8234;H01L21/60;H01L21/8242;H01L23/522;H01L23/528;H01L27/02 主分类号 H01L21/8234
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