Semiconductor device including a transistor and a capacitor having an aligned transistor and capacitive element

摘要

A semiconductor ( 10 ) has an active device, such as a transistor, with a directly underlying passive device, such as a capacitor ( 75, 77, 79 ), that are connected by a via or conductive region ( 52 ) and interconnect ( 68, 99 ). The via or conductive region ( 52 ) contacts a bottom surface of a diffusion or source region ( 22 ) of the transistor and contacts a first ( 75 ) of the capacitor electrodes. A laterally positioned vertical via ( 32, 54, 68 ) and interconnect ( 99 ) contacts a second ( 79 ) of the capacitor electrodes. A metal interconnect or conductive material ( 68 ) may be used as a power plane that saves circuit area by implementing the power plane underneath the transistor rather than adjacent the transistor.