| 摘要 |
In accordance with one embodiment, the present technique provides an X-ray source. The X-ray source includes a field emitter array having a plurality of field emitter elements disposed in a vacuum chamber and configured to emit electrons in the vacuum chamber towards an anode assembly. The X-ray source also includes an anode disposed in the vacuum chamber for receiving the electrons emitted by the field emitter array and configured to thereby generate X-ray radiation. The X-ray source further includes a source of cleaning gas coupled to the vacuum chamber, wherein the source of cleaning gas is configured to provide the cleaning gas to the vacuum chamber towards the field emitter array to reduce deposition of contaminants on or to clean contaminates from the field emitter array.
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