| 摘要 |
A MEMS switch includes a micro-machined monolithic layer ( 122 ) having, a seesaw ( 52 ), a pair of torsion bars ( 66 a , 66 b), and a frame ( 64 ). The frame ( 64 ) supports the seesaw ( 52 ) for rotation about an axis ( 68 ) established by the torsion bars ( 66 a, 66 b). Shorting bars ( 58 a , 58 b) at ends of the seesaw ( 52 ) connect across pairs of switch contacts ( 56 a 1, 56 a 2, 56 b 1, 56 b 2 ) carried on a substrate ( 174 ) bonded to one surface of the layer ( 122 ). A base ( 104 ) is also joined to a surface of the layer ( 122 ) opposite the substrate ( 174 ). The substrate ( 174 ) carries electrodes ( 54 a , 54 b) for applying forces to the seesaw ( 52 ) urging it to rotate about the axis ( 68 ). An electrical contact island ( 152 ) supported at a free end of a cantilever ( 166 ) ensures good electrical conduction between ground plates ( 162 a , 162 b) on the layer ( 122 ) and electrical conductors on the substrate ( 174 ).
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