发明名称 System and method for check-in control in wafer testing
摘要 A testing system for check-in control in wafer testing. The testing system comprises a testing tool, an optical character recognition (OCR) device, and a controller. The testing tool performs a testing process of an article. The OCR device reads optical characters disposed on the article. The controller, connected to the testing tool and the OCR device, automatically initiates a check-in process for the article according to the read optical characters.
申请公布号 US7123040(B2) 申请公布日期 2006.10.17
申请号 US20040793441 申请日期 2004.03.04
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 YANG KENG-CHIA;CHEN CHIH-CHIEN;CHEN LET-LONG
分类号 G01R31/26 主分类号 G01R31/26
代理机构 代理人
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