GATE VALVE APPARATUS AND PROCESSING SYSTEM,申请号KR20060032912-传众专利搜索

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发明名称	GATE VALVE APPARATUS AND PROCESSING SYSTEM
摘要
申请公布号	KR20060108238(A)	申请公布日期	2006.10.17
申请号	KR20060032912	申请日期	2006.04.11
申请人	TOKYO ELECTRON LIMITED	发明人	HIROKI TSUTOMU
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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