ROBOT ARM OF WAFER HANDLER,申请号KR20050030216-传众专利搜索

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发明名称	ROBOT ARM OF WAFER HANDLER
摘要
申请公布号	KR20060108086(A)	申请公布日期	2006.10.17
申请号	KR20050030216	申请日期	2005.04.12
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HAN, KWANG WUN
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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