发明名称 Semiconductor cassette reducer
摘要 A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the second substantially U-shaped plate. Several retention springs are attached to the first substantially U-shaped plate. The retention springs hold the semiconductor cassette reducer in a FOUP (front opening unified pod).
申请公布号 US7121414(B2) 申请公布日期 2006.10.17
申请号 US20010035644 申请日期 2001.12.28
申请人 BROOKS AUTOMATION, INC. 发明人 BECKHART GORDON HAGGOTT;CONARRO PATRICK ROONEY;FARIVAR-SADRI KAMRAN MICHAEL
分类号 A47G19/08;H01L21/673 主分类号 A47G19/08
代理机构 代理人
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