发明名称 |
Semiconductor cassette reducer |
摘要 |
A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the second substantially U-shaped plate. Several retention springs are attached to the first substantially U-shaped plate. The retention springs hold the semiconductor cassette reducer in a FOUP (front opening unified pod).
|
申请公布号 |
US7121414(B2) |
申请公布日期 |
2006.10.17 |
申请号 |
US20010035644 |
申请日期 |
2001.12.28 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
BECKHART GORDON HAGGOTT;CONARRO PATRICK ROONEY;FARIVAR-SADRI KAMRAN MICHAEL |
分类号 |
A47G19/08;H01L21/673 |
主分类号 |
A47G19/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|