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发明名称
METHOD OF PRODUCING AN INTERCONNECT STRUCTURE FOR AN INTEGRATED CIRCUIT
摘要
申请公布号
KR100633979(B1)
申请公布日期
2006.10.16
申请号
KR20017000966
申请日期
2001.01.22
申请人
发明人
分类号
H01L21/768
主分类号
H01L21/768
代理机构
代理人
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