METHOD FOR DETECTING OXIDATION INDUCED STACKING FAULT OF A SEMICONDUCTOR DEVICE,申请号KR19990016385-传众专利搜索

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发明名称	METHOD FOR DETECTING OXIDATION INDUCED STACKING FAULT OF A SEMICONDUCTOR DEVICE
摘要
申请公布号	KR100634153(B1)	申请公布日期	2006.10.16
申请号	KR19990016385	申请日期	1999.05.07
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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