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发明名称
Substrate conveying device
摘要
申请公布号
KR100633970(B1)
申请公布日期
2006.10.13
申请号
KR20047014207
申请日期
2003.04.16
申请人
发明人
分类号
B65G49/06;B65G51/03;H01L21/677;H01L21/68
主分类号
B65G49/06
代理机构
代理人
主权项
地址
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