METHOD FOR FORMING A POROUS REACTION INJECTION MOLDED CHEMICAL MECHANICAL POLISHING PAD

摘要

Formation of a chemical-mechanical polishing cushion comprises: providing a tank, a storage silo with micro-bead, an isocyanates storage tank with isocyanates; delivering the polymer materials and the micro-beads to a premix producing tank; forming the premix from polymer materials and the micro beads; delivering the premix to the premix producing tank; forming a mixture from the premix and the isocyanates; injecting the mixture in a closed form tool; hardening the polishing cushion in the form tool; and degassing at least one of the tank, isocyanates storage tank and the form tool. Formation of a chemical-mechanical polishing cushion comprises: providing a tank with polymer material; providing a storage silo with micro-bead; providing an isocyanates storage tank with isocyanates; delivering the polymer materials and the micro-beads to a premix producing tank; forming the premix from polymer materials and the micro beads; delivering the premix to the premix producing tank; forming a mixture from the premix and the isocyanates; injecting the mixture in a closed form tool; hardening the polishing cushion in the form tool; and degassing at least one of the tank, isocyanates storage tank and the form tool.