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发明名称
DEFECT INSPECTION METHOD AND DEFECT INSPECTION APPARATUS USING THE SAME
摘要
申请公布号
KR20060107386(A)
申请公布日期
2006.10.13
申请号
KR20060031714
申请日期
2006.04.07
申请人
OMRON CORPORATION
发明人
OKABE HIROSHI;MATSUMOTO TOSHIHIKO
分类号
G01N21/95;G01N21/88
主分类号
G01N21/95
代理机构
代理人
主权项
地址
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