| 摘要 |
PROBLEM TO BE SOLVED: To continuously obtain excellent cleaning performance by remarkably reducing the usage amount of a sulfuric acid, and to perform excellent and efficient cleaning processing by properly controlling the concentration of a persulfuric acid during cleaning. SOLUTION: This system is provided with a cleaning apparatus 1 for cleaning a cleaning object using a persulfuric acid solution as a cleaning liquid, electrolytic reaction apparatuses 10a, 10b, 14 and 15 each regenerating the persulfuric acid solution by electrolytic reaction, circulation lines 4, 6 for circulating the persulfuric acid solution between the cleaning apparatus and the electrolytic reaction apparatus, a persulfuric acid concentration measuring means 16 for measuring the persulfuric acid concentration of the solution, and a power source control section 17 for controlling a power source 14 for electrolysis. By this configuration, a high cleaning effect can be maintained by managing the persulfuric acid concentration of the solution, and power for electrolysis can be efficiently used. COPYRIGHT: (C)2007,JPO&INPIT
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