Microstructure devices and their production

摘要

An embossing master ( 20 ) is produced by successively applying epoxy layers ( 2, 10 ) over a silicon substrate ( 1 ) and selectively exposing them to UV to cross-link according to a pattern. Non-exposed epoxy is developed away to leave a pattern of cured epoxy at each level. This provides a multi-level master, with a desired 3D configuration. The master ( 20 ) is then used to emboss a polymer blank to provide a substrate ( 80 ) and a different master is used to emboss a blank to provide a superstrate ( 90 ). The substrate ( 80 ) has aligned socket and channel grooves ( 80, 81 ) and the superstrate ( 90 ) has a socket groove ( 91 ). When the superstrate is mated with the substrate, there is a socket for receiving a fluidic capillary or a detection waveguide. The capillary or waveguide is aligned with the channel for optimum fluidic flow or optical detection.