| 摘要 |
A semiconductor device includes an elastic member, first and second electrodes, a piezoelectric actuator, and an electrostatic actuator. One end of the elastic member is fixed on a substrate through an anchor so as to form a gap between the elastic member and the substrate. The first and second electrodes are placed to face the other end of the elastic member and the substrate, respectively. The piezoelectric actuator deforms the other end of the elastic member to bring it close to the substrate. The electrostatic actuator includes a third electrode placed in the elastic member and a fourth electrode placed on the substrate so as to face the third electrode, and deforms the other end of the elastic member so as to bring it close to the substrate. The distance between the first and second electrodes is changed by driving the piezoelectric actuator and the electrostatic actuator.
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