| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a micromirror element having a thin torsion bar having a more accurate thickness while being accurately located at the middle in the thickness direction of a material substrate, and to provide a micromirror element of such kind. SOLUTION: In manufacturing a micromirror element which is provided with a mirror forming part, a frame part, and a torsion bar on the material substrate 8 having a layer structure including a plurality of silicon layers 20 and 21 and at least an intermediate layer 160, a process in which a pretorsion bar T' which is thinner than the mirror forming part and in contact with the intermediate layer, at least a part of the mirror forming part connected to the pretosion bar T', and at last a part of the frame part connected to the pretorsion bar T' are formed, and a process in which the torsion bar T is formed by removing the intermediate layer 160 connected to the pretorsion bar T', are performed on a silicone layer 20 by etching the silicon layer. COPYRIGHT: (C)2007,JPO&INPIT |
