| 摘要 |
PROBLEM TO BE SOLVED: To reduce a time required for transporting a substrate by shortening a time required for delivering the substrate between two substrate transporting robots. SOLUTION: The substrate processing device is provided with an indexer 1 and a processor 2. An indexer robot 6 installed in the indexer 1 is provided with upper and lower hands 9A and 9B that are arranged on the upper and lower sides. A main transporting robot 11 installed in the processor 2 is provided with upper and lower hands 13A and 13B that are arranged on the upper and lower sides. A substrate W is delivered between the indexer robot 6 and the main transporting robot 11 by a shuttle transporting mechanism 15. The shuttle transporting mechanism 15 is provided with a vertically arranged upper hand 19A and a lower hand 19B, and a hand driving mechanism for opening and closing operations to vertically move them to make them be apart from each other and to make them be close to each other, respectively. COPYRIGHT: (C)2007,JPO&INPIT
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