| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film for an infrared sensor which shows sensitivity excellent also in a room temperature, and by which a noise generation is also suppressed. SOLUTION: An epitaxial growth of an oxide expressed with a general formula (La<SB>1-x</SB>AE<SB>x</SB>)MnO<SB>3</SB>(wherein it is 0.02≤x≤0.5, and AE is Ba or Sr) is carried out on a single crystal texture substrate, and depositing of the thin film for the infrared sensor is carried out. As the formation material of the above substrate, it is desirable that it is a material about larger lattice constant than the lattice constant of the above oxide. COPYRIGHT: (C)2007,JPO&INPIT
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