| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for preparing a master disk for an information recording medium having a groove shape in which a side wall part and a pattern head part are highly smooth. SOLUTION: The method for preparing the master disk for the information recording medium is provided in which the latent image of a prescribed pattern formed on an electron beam sensitive resist thin film 230 on a substrate 210 by the irradiation of electron beams is developed by a developing liquid and a pattern shape is formed, and the method has an organic thin film forming process of forming an organic thin film 220 which has the property of suppressing backscattering electrons from the substrate 210 of the electron beams transmitted through the electron beam sensitive resist thin film 230 and is soluble to the developing liquid between the substrate 210 and the electron beam sensitive resist thin film 230. COPYRIGHT: (C)2007,JPO&INPIT
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