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发明名称
Isolierverfahren für eine Halbleitervorrichtung
摘要
申请公布号
DE4422957(B4)
申请公布日期
2006.10.12
申请号
DE19944422957
申请日期
1994.06.30
申请人
SAMSUNG ELECTRONICS CO. LTD.
发明人
CHO, HYUN-JIN;YANG, HEUNG-MO;SHIN, YUN-SUNG;KWON, OH-HYUN
分类号
H01L21/316;H01L21/76;C23C8/24;H01L21/32;H01L21/762
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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