| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide heated gas supply equipment capable of stably supplying heated gas having a prescribed temperature. <P>SOLUTION: The heated gas supply equipment is constituted as follows: A gas supply valve 14 for intermitting the supply of a heated gas A3 to a gas consumption part 5 is disposed in a connection pipe 13 for connecting an extended gas supply pipe 12 for guiding the air A3 heated by a heater 11 to the gas consumption part 5; and a temperature control means 17 which adjusts an output of the heater 11 and adjusts a temperature of the supplied heated gas A3 for the gas consumption part 5 into a preset supply temperature (tas) based on a supplied gas temperature sensor 16 for sensing the temperature (ta) of the heated gas A3 to supply to the gas consumption part 5 through the extended gas supply pipe 12, and the sensed temperature (ta) by the supplied gas temperature sensor 16. is disposed. Therein, a liquid pipe 20 through which heat insulating liquid W passes is extended along the extended feed pipe and circulation liquid heating means 22, 26, 27, 28 which heats heat insulation liquid W in the liquid pipe 20 for allowing the heat insulation liquid W to pass into a preset circulation temperature (tws) (≈(tas)) are disposed. <P>COPYRIGHT: (C)2007,JPO&INPIT |
