| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that makes its miniaturization possible by improving efficiency of arranging functional components required on the optical path of a laser beam. <P>SOLUTION: Between a light incident lens 17 and an exiting lens 18 constituting a beam expander 13, there are arranged a dichroic mirror 22 by which a guide beam from a visible-light light source 24 is made incident coaxially with the optical axis of the laser beam, and a half-mirror 26 by which a part of the laser beam is derived to a light receiving element 27 that is disposed outside the optical path of the laser beam to detect the laser beam. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
