| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an irradiating apparatus which can prevent irradiation unevenness, without complicating the configurations by high irradiation intensity, when an increased precision performs unwanted light irradiation. <P>SOLUTION: A plurality of laser beams by a plurality of laser light sources 11-17 are ejected through an optical fiber bundle 2. Paired cylindrical lens array 4 overlays in the direction of an x axis about these plurality of the laser beams, and the luminance is equalized in the direction of the x axis. After the equalizing, the laser beams glare to the irradiation object 6. Consequently, the irradiation unevenness can be prevented in the irradiation object 6. Moreover, such an equalization optical means can constitute only by the paired cylindrical lens array 4. It is not necessary to use a finely optical element device. Thus, the irradiation apparatus can consist of a simple configuration, without complicating the configuration. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
