| 摘要 |
PROBLEM TO BE SOLVED: To provide a joining member of wafers with each other or the joining member of the wafer and another material for which the cross sectional shape of an end is turned to such a shape that chipping, especially chipping on a joining surface, and peeling are not easily generated compared to a conventional one; and to provide a manufacturing method of such a joining member simultaneously. SOLUTION: For the end on the outer side, the surfaces of the respective wafers on a joining side are put together and joined with each other, and in the cross sectional shape of the end on the outer side, the outer periphery is linear, arcuate or their combined shape, and a joining part is on the outermost side and is convex to the outer side. Further, the cross sectional shape of the end face is an R type or a T type. COPYRIGHT: (C)2007,JPO&INPIT
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