| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and simple structured triaxial magnetic sensor, or a triaxial magnetic sensor juxtaposing at least one hall element and a plurality of magnetoresistive elements, particularly a huge magnetoresistive element (GMR element) on the same substrate, where the hall element is placed at a remote position from the GMR element, not influenced by the magnetic field of biased magnet of the GMR element, as well as a manufacturing method thereof. SOLUTION: The triaxial magnetic sensor capable of detecting magnetic field in the triaxial directions is presented, since a GMR element 9 having sensitive axes in the X-axis direction and the Y-axis direction is prepared on a silicon substrate 1, while a hall element 7 having a sensitive axis in the Z-axis direction is placed at a remote position from the GMR element 9 in the direction of the X-Y plane and the Z-axis direction, namely a position the magnetic fields of the bias magnets of GMR element are canceled out each other. By forming the hall element 7 simultaneously with a transistor 2, and forming a hall element checking coil 8 simultaneously with a wiring layer 3, the compact and easy-assembling triaxial magnetic sensor is obtained. COPYRIGHT: (C)2007,JPO&INPIT
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