METAL MASK, AND METHOD AND DEVICE FOR POSITIONAL ALIGNMENT OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a technology for correctly positioning each mask part when fixing a metal mask 1 having a plurality of mask parts 2 to a frame while applying tension to the metal mask. SOLUTION: Each side of the metal mask 1 is held and pulled by a plurality of tension units 13 to apply the tension to the metal mask 1. A glass scale 25 is overlapped with the metal mask 1, and each mask 2 is correctly positioned by adjusting the tension so that an imaginary origin indicated by an alignment mark 6 formed on the metal mask 1 is coincident with the reference point of the reference mark formed on the glass scale 25. The positional accuracy of the imaginary origin indicated by each alignment mark 6 can be enhanced, and the alignment of high accuracy can be realized by using eight circular marks formed of half-etching for the alignment marks 6. COPYRIGHT: (C)2007,JPO&INPIT