Pattern loading effect reduction for selective epitaxial growth

摘要

A method of reducing the pattern-loading effect for selective epitaxial growth. The method includes the steps of: forming a mask layer over a substrate; forming an isolation region in the substrate isolating an active region and a dummy active region; removing at least a portion of the mask layer in the active region and thus forming a first opening, the substrate being exposed through the first opening; removing at least a portion of the mask layer in the dummy active region and thus forming a second opening, the substrate being exposed through the second opening; and performing selective epitaxial growth simultaneously on the substrate in the first opening and second openings. By introducing the second opening wherein epitaxial growth occurs, the pattern density is more uniform and thus the pattern-loading effect is reduced.