发明名称 GYRO VIBRATION PIECE, GYRO SENSOR, AND MANUFACTURING METHOD FOR GYRO VIBRATION PIECE
摘要 <P>PROBLEM TO BE SOLVED: To prevent a driving part or a detecting part from being damaged by impact such as falling-down, for example, applied from an outside of a gyro vibration piece, so as to enhance impact resistance. <P>SOLUTION: This gyro vibration piece 10 of the present invention is formed with a base part 12 and connection arms 13, 14 constituting a support part 11, two detection arms 16A, 16B, and driving arms 15A, 15B, 15C, 15D connected to tips of the connection arms 13, 14. A multi-stepped shape of connection face is formed on each side face of connecting parts 22, 22' where the driving arms or the detection arms are connected continuously to other portions. The piece has, on the connection face, the first stepped parts 20, 20' located in the innermost side of the connection part of the multi-stepped shape, and provided with wall faces R1, R2 of substantially circular arc shape connected continuously to surfaces of the driving arms or the detection arms, and a prescribed depth of bottom face. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006275878(A) 申请公布日期 2006.10.12
申请号 JP20050097590 申请日期 2005.03.30
申请人 SEIKO EPSON CORP 发明人 KAWAUCHI OSAMU
分类号 G01C19/56;G01C19/5628;H01L41/08;H01L41/18;H01L41/22;H01L41/23;H01L41/332 主分类号 G01C19/56
代理机构 代理人
主权项
地址