| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve such a problem that there is a risk of causing a warping on a substrate upon polishing for thinning because the thickness of every one sheet of substrate such as a retardation plate and a double refraction plate constituting an optical filter is polished for thinning before sticking in the conventional manufacturing method and, when an antireflection film and a protective coat film are formed on the main surface of the thinned substrate, the warping grows further larger. <P>SOLUTION: The manufacturing method of optical filter is provided with a process of joining two sheets of substrates according to a direct joint method, a process of polishing the thicknesses of the substrates from the main surface sides of the other sides opposite to the joint surface of the substrates, a process of joining an additional substrate to the main surface of the polishing side of one side substrate among the joined substrates by the direct joint method, a process of polishing the thickness of the additionally joined substrate from the main surface side of the opposite side to the joint surface, a process of repeating the above described two processes to form a laminated base body made by joining the plural sheets of substrates and a process of forming the antireflection film etc. on the uppermost main surface of the laminated base body. <P>COPYRIGHT: (C)2007,JPO&INPIT |
