| 摘要 |
PROBLEM TO BE SOLVED: To provide a multilayer dielectric film for a thin film capacitor having a stabilized high quality dielectric thin film useful for a capacitor component and a printed wiring board incorporating a component. SOLUTION: The multilayer film is obtained by forming an underlying metal, a metal rendered conductive, an inorganic dielectric, and a metal rendered conductive sequentially by thin film coating technology such as sputtering, deposition, CVD, electroless plating, or electroplating on a polyimide benzo oxazole film employing diamines having benzo oxazole frame and aromatic tetra carboxylic acid dianhydride as a source and having a linear expansion coefficient of 1-12 ppm/°C. COPYRIGHT: (C)2007,JPO&INPIT
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