| 摘要 |
PROBLEM TO BE SOLVED: To diminish damage of the nozzle section even if the nozzle section comes in contact with the substrate while reducing the variation of the thickness of the application solution coated onto the substrate. SOLUTION: The nozzle-deforming mechanism 35 of a coater has two or more piezoelectric elements 351 arranged respectively at two or more positions of the nozzle section 32 in the longitudinal direction, and the nozzle section 32 is bent by driving the nozzle-deforming mechanism 35. The nozzle section 32 and the nozzle-deforming mechanism 35 are supported with a nozzle supporting section 311 so that they contact with each other in a separable way from the substrate side. During coating with the coater, the nozzle section 32 is bent flexibly according to the shape of the upper surface of the substrate so as to reduce the variation of the thickness of the application solution coated onto the substrate. Even if the nozzle section 32 comes in contact with the substrate owing to an unassumed factor, the nozzle section 32 and the nozzle-deforming mechanism 35 are separated from the nozzle supporting section 311 so as to relax the impact, reducing the damage of the nozzle section 32. COPYRIGHT: (C)2007,JPO&INPIT
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