| 摘要 |
PROBLEM TO BE SOLVED: To enable precise coating of an application solution onto a substrate. SOLUTION: The head section of a coater has a nozzle section 32 having a line-shaped discharging outlet discharging an application solution onto the upper surface of a substrate, two or more piezoelectric elements 351 arranged at two or more positions of the nozzle section 32 in the longitudinal direction and a detection unit acquiring information on the height of the upper surface of the substrate. The head section and the detection unit move in the principal scanning direction relative to the substrate while discharging the application solution from the discharging outlet. During coating, each piezoelectric element 351 applies a force to each corresponding site of the nozzle section 32 in the direction perpendicular to the upper surface of the substrate, in response to the output from the detection unit, so as to make the nozzle section 32 bent according to the shape of the upper surface of the substrate 9, resulting in a reduction of variation of the interval between the upper surface of the substrate and the discharging outlet and thus permitting precise coating of the application solution onto the substrate. COPYRIGHT: (C)2007,JPO&INPIT
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