| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate drying apparatus for efficiently drying a substrate by limiting air flow blown from an air knife by a relatively easy method with no need of processing the apparatus itself. SOLUTION: An air blowing apparatus 1 is installed downstream in the transportation direction of a substrate 3 transported in one direction of a washing line for blowing air in the reverse direction to the transportation direction of the substrate 3 to push back a liquid sticking to the substrate surface in the reverse direction to the transportation direction and an air baffle member 20 is installed near the air blowing apparatus 1 at a prescribed gap from the substrate surface for limiting the air current blown to the substrate surface by the air blowing apparatus 1 and passing the air as it remains stratified through the substrate surface. COPYRIGHT: (C)2007,JPO&INPIT
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