| 摘要 |
PROBLEM TO BE SOLVED: To provide a laminating apparatus and a laminating method in which vibration can be applied and occurrence of warpage and air bubbles can be prevented even when a supporting part supporting a substrate is displaced in order to transport the substrate. SOLUTION: The apparatus is provided with a turntable 1 on which substrates P1, P2 for disk are placed, a laminating part 2 laminating the piled substrates P1, P2, a vibration part 3 applying vibration to a disk D after laminating, and an ultraviolet ray irradiation part 5 irradiating the ultraviolet rays. A vibrator 33 is provided at an energizing plate 31 pressing the disk D placed on a susceptor 4 on the turntable 1 from an upper part. The energizing plate 31 is constituted so as to be elevated or lowered through a strut part 32. COPYRIGHT: (C)2007,JPO&INPIT
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