发明名称 DETECTOR, EXPOSURE APPARATUS, AND DEVICE-MANUFACTURING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a detector capable of properly detecting the leakage of a liquid. <P>SOLUTION: The detector S is provided with a detection space 3, connected to a predetermined space K1 filled with a liquid LQ via a flowing passage 2; an object 1 provided in the detection space 3 and displaceable by the liquid LQ flowing into via the flowing passage 2 from the predetermined space K1; a detector 4 for detecting the state of the object 1; and a control unit 5 for judging the leakage of the liquid LQ from the predetermined space K1, on the basis of a result of detection of the detector 4. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006278795(A) 申请公布日期 2006.10.12
申请号 JP20050096606 申请日期 2005.03.30
申请人 NIKON CORP 发明人 OKADA HISAYA
分类号 H01L21/027;G01F23/24;G01F23/28;G03F7/20 主分类号 H01L21/027
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