| 摘要 |
PROBLEM TO BE SOLVED: To provide an alignment system wherein a load to a driving mechanism is reduced by providing a mechanism for supporting mirror separately from a driving mechanism for driving the mirror. SOLUTION: The alignment system includes a parallel link mechanism 3 having actuators 3a to 3f linked with a mirror supporting frame being an outer frame of a mirror 1, a fixed-side frame 4 having the parallel link mechanism 3 attached thereto, a linear motion mechanism 9 slidable to the fixed-side frame 4, a counter weight 6 having a weight balanced with a total weight of the mirror 1 and the mirror supporting frame 2, and a lever mechanism 5. The lever mechanism 5 has a fulcrum 5a linked with the linear motion mechanism 8, a point of action 5c linked with the mirror supporting frame 2, and a point of power 5b to which the counter weight 6 is fixed. COPYRIGHT: (C)2007,JPO&INPIT |
