| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for evaluating accurately the contamination state of a local space passed by a substrate at the substrate manufacturing time. SOLUTION: This evaluation method of the contamination state of the local space in a substrate manufacturing process has characteristics, wherein in the substrate manufacturing process, a passive sampler is put into the local space passed by the substrate, and contaminants in the space are collected into an adsorbent in the passive sampler, and then the adsorbed contaminant is eliminated from the adsorbent, and the eliminated contaminant is analyzed. COPYRIGHT: (C)2007,JPO&INPIT
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