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发明名称
Plasmaanlage und Verfahren zum anisotropen Einätzen von Strukturen in ein Substrat
摘要
申请公布号
DE50304886(D1)
申请公布日期
2006.10.12
申请号
DE20035004886
申请日期
2003.09.09
申请人
ROBERT BOSCH GMBH
发明人
LAERMER, FRANZ;URBAN, ANDREA
分类号
H01L21/00;H01L21/306
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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