发明名称 REMOVAL OF CONTAMINANT FROM FLUID
摘要 PROBLEM TO BE SOLVED: To provide a system that removes contaminant from fluids such as carbon dioxide. SOLUTION: A method and a tool that remove the contaminant from the fluid are disclosed. The fluid is introduced into a decontaminanation chamber in such a form as the cooled contaminant is dropped in the decontamination chamber to produce refined fluid. The refined fluid is subsequently collected and can be used in a super-critical processing system. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006279037(A) 申请公布日期 2006.10.12
申请号 JP20060077373 申请日期 2006.03.20
申请人 SUPERCRITICAL SYSTEMS INC 发明人 BERTRAM RONALD T;SCOTT DOUGLAS M
分类号 H01L21/304;B01J3/00 主分类号 H01L21/304
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