| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inexpensive piezoelectric element having sufficient electrode ability and having sufficient adsorbent performance with respect to a piezoelectric material, and to provide a droplet discharge head having the piezoelectric element. <P>SOLUTION: A common electrode 46 (lower electrode), the piezoelectric material 48, and a signal electrode 50 (upper electrode) are laminated on the piezoelectric element 34 in this order. At least one layer of an electric conduction layer constituted of at least one type selected from metals of Ta, V, Nb, Mo, W, Ti, Zr and Hf, an alloy comprising one type or more of an element of the metal, a nitride comprising one type or more of the element of the metal, a silicide comprising one type or more of the element of the metal, and a boride comprising one type or more of the element of the metal is applied as one layer of a structure layer of the common electrode 46 and/or the signal electrode 50. Thus, the inexpensive piezoelectric element 34 can be obtained having sufficient electrode ability and the electrode which is difficult to be peeled off. <P>COPYRIGHT: (C)2007,JPO&INPIT |
