SPECIMEN INSPECTION DEVICE, SPECIMEN INSPECTION METHOD, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To correct physical error caused by respective factors constituting a device thereby making an inspection image coincide with a reference image with higher accuracy.

SOLUTION: This specimen inspection device is characterized by being equipped with: an image data acquisition part 150 for acquiring an optical image on a specimen under inspection in a prescribed pixel width while moving pixel by pixel in an X direction; a correction circuit 140 for correcting pixel rows segmented in a prescribed pixel width within the prescribed pixel width while moving pixel by pixel in a prescribed direction with respect to the acquired optical image; an area segmenting circuit 215 for arranging the corrected pixel rows in regular order to segment them as an image in a prescribed area; and a comparative determination processing circuit 218 for comparing the image in the prescribed area with the reference image.

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