发明名称 CLEANING METHOD AND CLEANING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a cleaning method and a cleaning device which offer cleaning effect by a surfactant and a decomposing/sterilizing effect by ozone, at the same time. <P>SOLUTION: An ozone-containing cleaning solution provided by dissolving ozone into a saturated fatty group surfactant solution that does not have the inter-carbon double bond expressed by general following Formula is used to carry out cleaning by the surfactant and decomposition/sterilization by the ozone in a single process. In the Formula (R)<SB>n</SB>-X, R denotes a hydrophobic group comprising a saturated hydrocarbon or of a saturated halocarbon compound, n denotes an integer of 1, 2, or 3, and X denotes a hydrophilic compound having any one of ether group, hydroxyl group, ester group, carboxyl group, sulfonic group, and amino group, each group not having an inter-carbon double bond and an aromatic group. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006278644(A) 申请公布日期 2006.10.12
申请号 JP20050094507 申请日期 2005.03.29
申请人 YAMAZAKI KAZUTOSHI;SEKISUI CHEM CO LTD 发明人 YAMAZAKI KAZUTOSHI;FUJIMORI YOJI
分类号 H01L21/304;A61L2/20;B01F5/06;B08B3/08;C11D3/39 主分类号 H01L21/304
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