| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing device, a history information recording method, a history information recording program, and a history information recording system, which reduce a work load for cause finding work such as an abnormality. SOLUTION: In the substrate processing device having a plurality of processing rooms for processing substrates and a conveying means for conveying substrates into and out of the processing rooms, the substrate processing device comprises: a conveying history recording means for recording as first history information by correlating the history information for conveying of the substrates by the conveying means with each substrate as a conveying target; a processing history recording means for recording as second history information by correlating the history information for processed conditions of the substrates in the processing room with each substrate as a conveying target; and an alarm history recording means for recording as third history information by correlating the history information for alarms occurred in the conveying means or processing room with each substrate related with the alarms. COPYRIGHT: (C)2007,JPO&INPIT
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